13.01.2012

New piezo actuator PXY 201 for nanopositioning


New piezo actuator PXY 201 for nanopositioning

piezosystem jena has expanded its PXY series and introduces an XY plane nanopositioning and microscanning stage featuring a wide center clearance.

The PXY 201 CAP offers a clearance of 30x30 mm² and a motion range of up to 250 microns in open loop and up to 200 microns in closed loop. The PXY 201 CAP can be equipped with an integrated high resolution capacitive feedback sensor. Creep and hysteresis can be compensated for by using the stage in combination with a matching amplifier from piezosystem jena.

The system provides supreme position stability, linearity, repeatability, and accuracy. Furthermore, digital amplifiers from piezosystem jena allow optimization of the electrical parameters during system operation for the best performance under the conditions of operation.

Thanks to the FEA-optimized guidance, the system features supreme trajectory accuracy. The stage is very robust against high loads due to the frame design of the guidance. To minimize overshooting and to shorten settling while scanning, the PXY 201 line is equipped with an internal passive damping system. Also, any kind of position noise is reduced.

Vacuum and cryogenic versions are available upon request, as well as body material variations of invar, super invar, aluminum, or titanium.

With all these characteristics, the PXY 201 CAP is an excellent choice for applications such as scanning microscopy, surface analysis, metrology and alignment, as well as wide range nanopositioning and micro scanning requirering sub-nm accuracy and free aperture.


NEUER Produktkatalog von piezosystem jena

  • Anwendungsbeispiele von Piezopositionierern
  • Piezoelemente mit Nanometer-Präzision
  • Piezokomposite- Hochlastaktoren
  • Motion Control Elemente
  • Piezoline: Detaillierte Beschreibung der Piezotechnologie
  • Ausführliche Erklärung der Technologie in Hochlastaktoren

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