13.01.2012

ROTOR - high dynamic rotation stage


The ROTOR 10 SG one axis low voltage rotary stage is a development within our ultra-fast ROTOR-line. It provides a long steering and scanning range of up to 11 mrad. The well defined axis of rotation is centrically located. An incorporated free aperture allows axial beam applications as well.

Due to FEA-optimization of these stages, they can meet the highest dynamic performance and high planar guiding accuracy. This is accomplished even with high mass loads in a compact package. Our optimization also incorporates excellent temperature compensation properties for the stage. The sophisticated monolithic guidance design of the solid flexure hinges means the trajectory is free of mechanical play and friction - a feature provided by all stages of piezosystem jena. To avoid creep and hysteresis, the ROTOR 10 SG is equipped with a high resolution strain gauge measurement sensor.


Applications of the ROTOR system include fast scanning, lithography, laser beam steering, and many more. In combination with the controller by piezosystem jena in closed loop operation high stability, linearity, repeatability and accuracy are achieved. The compact design, with the raster pin and drill holes for mounting, allows an easy integration of the ROTOR 10 SG into an existing system. Vacuum and cryogenic versions are available on demand. We also offer body material variations such as: invar, superinvar, aluminum, and titanium.


Produktkatalog von piezosystem jena

  • Anwendungsbeispiele von Piezopositionierern
  • Piezoelemente mit Nanometer-Präzision
  • Piezokomposite- Hochlastaktoren
  • Motion Control Elemente
  • Piezoline: Detaillierte Beschreibung der Piezotechnologie
  • Ausführliche Erklärung der Technologie in Hochlastaktoren

(+49) 3641 66 88-0

Unsere Ingenieure stehen Ihnen gern für eine umfassende Beratung zur Verfügung.

E-Mail-Adresse: info@piezojena.com

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